AEC/APC Symposium Asia 2023 -Towards unraveling the complexity, share best practices in data science-

Program

Program Schedule is showin in JST(UTC+9)

Opening & Tutorial 1 Speech

Session chair : Hirai Toshiya, KOKUSAI ELECTRIC

9:45 Opening Remarks from AEC/APC Asia
Hidetaka Nishimura
Renesas Electronics
9:50 Program Outline
Hidenori Kakinuma
Kioxia Corporation
9:55
Tutorial-1
[ ONLINE ] Practical molecular, material and process design and process control with artificial intelligence and machine learning
Hiromasa Kaneko
Meiji University

Session 1

Session chair : Hisato Tanaka, Tokyo Electron / Takashi Kurosawa, Azbil

10:40
GX-018
[ ONLINE ] Smart Subfab Transformation using Context-Based Control
Holland Smith
INFICON
11:00
PTL-013
Unified Platform for detecting faults governed by Process Controls
Vishali Ragam
Applied Materials
11:20
DA-016
Mixed-type Defect Pattern Classifications
Takumi Maeda
University of Tsukuba
11:40
YM-009
Defective Wafer Map Classification for Unknown Patterns Using Image Generation Model
Seima Sakaguchi
Mie University
12:00 Lunch Break & Supplier Exhibition

Keynote Speech

Session chair : Hidenori Kakinuma, Kioxia

13:00
Keynote
The Future of Computing - Bits/Neurons/Qubits -
Shintaro Yamamichi
IBM Research -Tokyo, IBM Japan

Session 2

Session chair : Takahiro Tsuchiya, United Semiconductor Japan / Tomoya Tanaka, Tower Partners Semiconductor

13:45
PTL-007
Machine Learning Based Virtual Metrology for Effective Process Control in High Product Mix Manufacturing
Hyung Joo Lee
Siemens EDA
14:05
PTL-019
RF sensing method to detect low open area end point
Chuhua Song
INFICON
14:25
PTL-008
Comparison of Numerical Method with Prefixed Profile and Machine Learning-based Method for Wet Etching Amount Prediction
Chihiro Matsui
The University of Tokyo
14:45
DA-012
Population estimation of characteristic variation and its application to circuit simulation for power transistors
Haruka Fukumoto
ROHM Co.,Ltd
15:05
DA-017
Prediction of Defect Rate Using Machine Learning in Assembly Process
Yumiko Miyaji
Sony Semiconductor Manufacturing
15:25 Supplier Exhibition / Coffee Break

Tutorial 2 Speech

Session chair : Kenji Miyake, Office Miyake

15:45
Tutorial-2
Chiplet Integration Technology
Yoichiro Kurita
Tokyo Institute of Technology

Session 3

Session chair : Hirofumi Tsuchiyama, INFICON / Shunichi Shibuki, Sony Semiconductor Manufacturing

16:30
DA-011
Intelligent motor valve with failure prediction feature
Hiroyuki Kawazato
Shinwa Controls Co.,Ltd.
16:50
MEP-010
Development of Versatile Fault Detection Using Image Sensors
Takuya Sugiura
Renesas Electronics
17:10
DA-014
Anomaly detection of semiconductor manufacturing equipment by cluster analysis
Yuki Shiga
KOKUSAI ELECTRIC CORPORATION
17:30
PTL-015
Root Cause Analysis of Plasma Processes Perturbation using Optical Emission Spectroscopy Signals with Modified Autoencoder
Jaehyeon Kim
Sungkyunkwan Univ.

Author??s Interview / Supplier Exhibition / Reception & Awards

Session chair : Koichi Sakamoto, Tokyo Electron

18:00 Author's Interview
18:30 Reception & Supplier Exhibition
19:20 Best Paper & Student Award

TOP

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